冲成股份有限公司 JC's Chunson Limited
MX 6012

MX 6012

E+H

The MX601 gauges resistivity of wafers made of semi-insulating materials like Gallium Arsenide or Silicon Carbide. Fast handling without wafer preparation and excellent repeatability with best avoidance of piezo-electric effects. MX601’s serial interface allows data evaluation and statistics, as well as access to calibration constants and output types.

Combined thickness and resistivity gauge for 200 mm and 300 mm silicon wafers.

Measurement type

。Thickness

。Flatness (TTV)

。Resistivity 

。Sheet resistance

。P/N Dotation

Wafer Diameter 200, 300 mm
Thickness range 600 – 900 μm
Max. Warp 100 μm
Resistivity 0.001 – 200 Ohm·cm
Type check 0.020 – 200 Ohm·cm
Software MXNT