E+H
Fast contactless resistivity gauge for semi-insulating wafers up to 150mm.
Measurement type
。Thickness
。Resistivity
。Sheet resistance
。P/N Dotation
Wafer Diameter | up to 150mm |
Sensor Area Ø | 10mm |
Thickness range | 350 - 650 µm |
Measuring Time | max. 4 sec. |
Reproducibility | ± 1% |
Software | EHMaster |