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Automated Microscope for CD, Overlay, and Defect Detection System

Automated Microscope for CD, Overlay, and Defect Detection System

Hologenix

The NGS Series defect detection and metrology systems are designed for applications where automated optical defect detection and precision dimensional measurements on wafers and other parts are required. They are well suited for dual use as production tools or as versatile process development systems. These systems offer a choice of high end microscope components (Olympus/Nikon/Leica), BF/ DF/ DIC illumination, and linear motor staging with 0.02 micron scales. There are several configurations available depending on your requirements. These include:a 200mm platform, a 300mm platform and
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NGS 3500L – Advanced Metrology System

APPLICATIONS
。Wafer level defect detection & measurement
。Precision MEMS and HD component inspection
。Advanced microelectronics package inspection

POWERFUL
。Designed for automatic/ semi-automatic operation
。Extensive Defect Detection features & capability
。Integrated Dimensional Metrology features

PRECISE
。Sub-micron precision optical measurements
。High accuracy staging with 0.02 um linear encoder resolution

FAST
。50-100 defects/ measurements per second typical per field of view
。200mm/ second part staging speed

USER FRIENDLY
。Very easy to use, program and set up
。Highly visual data with rich color graphics & Video

FLEXIBLE
。Nomarski Microscope and other advanced options
。Optional Wafer and other part types handling
。Customizable for application specific solutions

NGS 3500L – Advanced Metrology System

。 200mm (optional 300mm) wafer/ part size capacity
。 Maximum stage Load capacity: 50 lb
。 250mm/ second maximum staging speed
。 Granite base and Z-column, stainless steel finish
。 Class 100 (10 optional) clean room compatible
。 Closed loop linear stages, with position feedback from 0.05 um resolution linear glass encoders
。 Non-linear 2D accuracy error correction
。 Accuracy U2 (XY): 1.5+0.6L/100 um, U1 (Z): 1.5+3L/100 um. Where L is length in mm
。 Computer: Windows High Performance PC
。 Platform:High Performance 3000L
。 Software: NGS 3500L Advanced Metrology Suite
。 Optical System: Flat Field objectives, with optional motorized 5 position turret
。 Camera: High resolution CCD array 60+db S/N ratio
。 Image Processing 256 grayscale with 1:5-1:50 subpixel ratio. Optional 5 MP Color or 5MP Grayscale
。 Video and optional Laser Auto focus
。 Illumination: software controlled Coaxial & backlight
。 Environmental: 17-23 deg C, 20-80% Humidity
。 Electrical 120/240 VAC, 15A single phase
。 Footprint: WxD: 32x36 inch. Height: 67 inches
。 Weight: 1500 lb crated

NGS 3500L – Advanced Metrology System

。 Automatic defect detection and classification
。 Graphical Defect maps, Image Archival, offline review of defects, and reprocessing of archived images
。 Flexible part scanning for operator convenience and throughput optimization
。 High Precision vision based part alignment
。 Dimensional Metrology Tools:
     Video Tools: Point, Line, Circle, Arc edge detectors with built in best fit and defect removal
     Constructions: Extensive geometric constructions, with distance and angle measurements (e.g. line to line, etc.)
     Origin & Skew: Unlimited reference frames
     Tolerancing: Dimensional, Angular, Geometric True Position (MMC, LMC, RFS)
     Units: Metric & inches
     Coordinates: Cartesian & Polar
     Step & Repeat: Repeat Loops for repeating features and multiple parts
     Reports: Data on screen, text file, or exports to Excel
     SPC: Average, SD, Range, Min, Max, Cp, Cpk
     Graphics & CAD: Drawing import/ Export
     Other: Auto Focus, Auto Lighting & Outlier Removal

Automatic Defect Detection & Classification
Automated Die Inspection
Precision Dimensional Metrology
Critical Dimension (CD) and Overlay Metrology Automatic and Manual Operation

  • VCSEL CD Measurement
  • Surface & Edge Defect Detection
  • Texture Defect Detection (e.g. stains, etc.)
  • Missing or Deformed Object Detection
  • Extensive Defect Review Capability
  • Graphic Maps & Image Archival
  • CAD file import