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  5. Crystal Slip Defect Detection (SlipFinder)
Crystal Slip Defect Detection (SlipFinder)

Crystal Slip Defect Detection (SlipFinder)

Hologenix

The SlipFinder is a wafer surface inspection system for the detection of crystal slip (lattice) dislocations. The system's optical configuration is based on the original Magic Mirror method, a full-field defocused optical reflective imaging technique. The system's high sensitivity and large field of view (15mm x 12mm) eliminates the subjective and tedious visual and microscope inspection methods. It provides a rapid "hands-off" slip inspection for in-line monitoring and production.
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Fully Automatic 300 mm Wafer Inspection
Defect Detection High Speed Optical Metrology 

The SlipFinder is capable of detecting crystal dislocations that occur during many types of wafer processes:

  • Epitaxy
  •  Oxidation, Diffusion
  •  Post Implant Annealing
  •  SOI
  •  Polishing
  •  Strained Silicon
  •  Many other Semiconductor Applications

Fully Automatic 300 mm Wafer Inspection
Defect Detection High Speed Optical Metrology 

  •  Fully Automated Defect Detection
  •  Full or Partial Wafer Inspection
  •  Adjustable Inspection Recipes
  •  Sub-micron Detection Sensitivity
  •  Macro optical Field of View: 15mm X 12mm
  •  Throughput: Approx 15 – 80 WPH
  •  Dual FOUPs; Optional FOSB, Open Cassette
  •  Optical Non-Contact Notch Finding
  •  Optional class M1 Mini-Environment
  •  Windows Software Environment
  •  SECS-GEM via RS232 or HSMS
  •  Full Factory Automation
  • Sorter Capabilities – Optional OCR
  •  Non-contact Notch, Flat-Finding and Centering Technology
  • Software: SlipFinder Advanced Metrology Suite under Windows
  • Platform:
    o YIS Series: Hologenix YIS300/200
    o SF Series: R-Theta-Z Stage
  •  Magic Mirror™ Optics (YIS series & SF300M):
    o Macro Field of View: 15mm X 12mm
    o Slip Detection Sensitivity: 1-2 mm length
  •  Nomarski (DIC) Optics (SF300N only):
    o Micro Field of View (< 3 mm)
    o Standard microscope options

Fully Automatic 300 mm Wafer Inspection
Defect Detection High Speed Optical Metrology 

  •  Automated detection of Slip Lines & other defects
  •  Detect, Count, Locate and Measure (Length)
  •  Windows Interface
  •  Adjustable Detection Sensitivity
  •  Adjustable Edge Exclusion
  •  Graphic display of wafer with highlighted Slip Sites
  •  Wafer Accept/Reject recipes
  •  Lot file Reports, Image Archiving and Printing
  •  Automated, Semi-Automated and Engineering Mode
  •  Inspection locations are completely configurable via a Layout/Grid tool.
  •  All Slip Lines are reported in mm using Wafer Coordinates
  •  System outputs Wafer Maps showing actual orientation and length of Slip Lines 
  •  Stitching - Sections of Slip Lines from different fields of view can be automatically combined and reported
  •  System can be configured to stop the Inspection upon failure to improve throughput
  •  SOI Edge Exclusion measurement capability

The SlipFinder is available in manual, semi-automated, or fully automated system configurations for 100 - 150mm, 150 - 200mm, or 300mm substrate sizes.


Common applications include:

• Epitaxial process control
• Rapid Thermal Processing (RTP, RTA)
• SOI wafer manufacturing
• High temperature diffusion processing