冲成股份有限公司 JC's Chunson Limited
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MX 3014-Z

MX 3014-Z

E+H

The MX3014-Z is an in-line module for belt or robot transported wafers. It gauges thickness on the fly between automated manufacturing processes. Completely self-calibrating for effortless usage.
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OEM integrated thickness gauge for 100-200mm silicon and insulating wafers.

Measurement type
。Thickness

Wafer Diameter 100 - 200mm
Accuracy ±1µm
Resolution 0.1µm
Thickness range 200 - 800 µm
Software EHMaster