E+H
Automatable geometry gauge for 182 and 210mm solar wafers.
Measurement type
。Thickness
。Flatness (TTV)
。Bow
。Warp
。Sori
Wafer Diameter | 182mm, 210mm |
Thickness Accuracy | ±0.5 µm |
Resolution | 75nm |
Thickness range | 200 - 600 µm |
Automatic wafer | geometry gauge yes |
Software | MXNT |