冲成股份有限公司 JC's Chunson Limited
MX 7012

MX 7012

E+H

The MX7012 is designed to control thickness, flatness (TTV), warp, waviness and roughness after wire sawing. Capacitive sensors scan a diagonal cut through the center of the wafer. On the sides where the saw wire enters and exits, thickness and roughness are measured simultaneously. (The latter with an opto-electronic measuring system.) Available asin-line integrated module or as hand-loaded stand-alone for spot checks. Comes with our powerful MX-NT operating software.

High resolution thickness and surface profiler for as-sawn 450mm silicon wafers.

Measurement type

。Thickness

。Waviness

。Roughness

。Nanotopography

Wafer Diameter  301 ±0,5 mm
Thickness range 680 - 870μm
Software MXNT