E+H
Combined thickness and resistivity gauge for 150mm and 200mm silicon wafers.
Measurement type
。Thickness
。Resistivity
。Sheet resistance
。P/N Dotation
Wafer Diameter | 150mm, 200mm |
Thickness | 500 – 800 μm |
Max. Warp | 100 μm |
Resistivity | 0.001 – 200 Ohm·cm |
Type check | 0.020 – 200 Ohm·cm |
Software | MXNT |