冲成股份有限公司 JC's Chunson Limited
MX601

MX601

E+H

The MX601 gauges resistivity of wafers made of semi-insulating materials like Gallium Arsenide or Silicon Carbide. Fast handling without wafer preparation and excellent repeatability with best avoidance of piezo-electric effects. MX601’s serial interface allows data evaluation and statistics, as well as access to calibration constants and output types.

Fast contactless resistivity gauge for semi-insulating wafers up to 150mm.

Measurement type

。Thickness

。Resistivity

。Sheet resistance

。P/N Dotation

Wafer Diameter up to 150mm
Sensor Area Ø 10mm
Thickness range 350 - 650 µm
Measuring Time max. 4 sec.
Reproducibility ± 1%
Software EHMaster