冲成股份有限公司 JC's Chunson Limited
MX 3012-AC

MX 3012-AC

E+H

The MX3012-AC is a robust and stable instrument for quick and simple manual thickness gauge. Made for a large variety of silicon and solar wafers and pieces of semiconducting or metallic materials. Fully self-calibrating without the need for gauge blocks nor reference wafers. With integrated 5-digit display. Workes as stand-alone or connected to a PC via serial interface, which allows collecting data of multiple measurements, calculating flatness (TTV), mean value or standard deviation of single wafers or of complete wafer lots.

Easy one-point thickness gauge for 75–300mm semiconducting and metallic materials.


Measurement type

。Thickness

。TTV

Wafer Diameter up to 300mm
Accuracy ±0.5 µm
Resolution 10nm
Dynamic range 800µm
Thickness range default 200 - 1000 µm
Software EHMaster