E+H
Easy one-point thickness gauge for 75–300mm silicon wafers.
Measurement type
。Thickness
Wafer Diameter | up to 300mm |
Accuracy | ±0.5 µm |
Resolution | 10nm |
Dynamic range | 800µm |
Thickness range | default 200 - 1000 µm |
Switchable to measure high-res material | yes |
Software | EHMaster |