冲成股份有限公司 JC's Chunson Limited
MX 301-Q

MX 301-Q

E+H

he MX301-Q is a robust and stable instrument for quick and simple manual thickness gauge. Made for a large variety of wafers consisting of insulating materials like quartz, sapphire or glass. Fully self-calibrating without the need for gauge blocks nor reference wafers. With integrated 5-digit display. Workes as stand-alone or connected to a PC via serial interface, which allows collecting data of multiple measurements, calculating flatness (TTV), mean value or standard deviation of single wafers or of complete wafer lots.

Easy one-point thickness gauge for 30–200mm non-conductive wafers.


Measurement type

。Thickness

Wafer Diameter up to 200mm
Thickness Accuracy ±0.5 µm
Resolution 0.1nm
Thickness range default 450 - 750µm
Switchable to measure high res material yes
Software EHMaster