冲成股份有限公司 JC's Chunson Limited
MX 301-8

MX 301-8

E+H

The MX301 is a robust and stable instrument for quick and simple manual thickness gauge of a large variety of silicon wafers. Adaptable to different thickness ranges within a few seconds. With customized exchangeable shims and an easy one-click calibration. With integrated 5-digit display. Workes as stand-alone or connected to a PC via serial interface, which allows collecting data of multiple measurements, calculating flatness (TTV), mean value or standard deviation of single wafers or of complete wafer lots.

Easy one-point thickness gauge for 30–200mm silicon wafers.


Measurement type

。Thickness

Wafer Diameter up to 200mm
Thickness Accuracy ±0.5 µm
Resolution 10nm
Dynamic range 800µm
Thickness range default 200 - 1000 µm
Switchable to measure high res material yes
Software EHMaster