E+H
Automatable geometry gauge for 150mm and 200mm silicon wafers.
Measurement type
。Thickness
。Flatness (TTV)
。Bow
。Warp
。Film stress
Wafer Diameter | 150mm, 200mm |
Thickness Accuracy | ±0.5 µm |
Resolution | 50nm |
Thickness range | 400 - 900 µm |
Automatic wafer geometry gauge | yes |
Software | MXNT |