冲成股份有限公司 JC's Chunson Limited
MX 204-6-33

MX 204-6-33

E+H

The MX204-6-33 works as manually loaded stand-alone tool as well as fully integrated in automated robot systems. With its 33 measuring points it controls thickness, bow and warp in high resolution. Wafer stress evaluation is optionally available. Different wafer sizes can be used without changeover thanks to the upstream centering station. Comes with our powerful MX-NT operating software.

Automatable geometry gauge for 100mm and 150mm silicon wafers.


Measurement type

。Thickness

。Flatness (TTV)

。Bow 

。Warp 

。Film stress

Wafer Diameter 125mm, 150mm (100mm is optional)
Thickness Accuracy ±0.6 µm
Resolution 50nm
Thickness range 100 - 700 µm
Automatic wafer geometry gauge yes
Bow & Warp include gravity connection no
Software MXNT