E+H
Automatable geometry gauge for 100mm and 150mm silicon wafers.
Measurement type
。Thickness
。Flatness (TTV)
。Bow
。Warp
。Film stress
Wafer Diameter | 125mm, 150mm (100mm is optional) |
Thickness Accuracy | ±0.6 µm |
Resolution | 50nm |
Thickness range | 100 - 700 µm |
Automatic wafer geometry gauge | yes |
Bow & Warp include gravity connection | no |
Software | MXNT |