冲成股份有限公司 JC's Chunson Limited
MX 2018-W

MX 2018-W

E+H

The MX2018-W manages the difficult 450mm size wafers. Upright position measuring avoids the otherwise enormous gravity-induced sag. With its 73 measuring points it controls center thickness, bow and warp in high resolution. For covering all geometry properies we recommend using MX2018-W in combination with MX1018. Within a robot sorter these both modules can measure two wafers simultaneously without detraction of the throughput. Comes with our powerful MX-NT operating software.

Automatable bow and warp gauge for 450mm silicon wafers.

Measurement type
。Thickness

。Flatness (TTV)

。Bow

。Warp

Wafer Diameter 300mm, 450mm
Warp Accuracy ±5 µm + 5% of reading
Warp Precision ±0.5 µm + 1% of reading
Warp range 800 µm
Automatic wafer geometry gauge yes
Software MXNT