E+H
High precision chip production geometry gauge for 300mm silicon wafers.
Measurement type
。Thickness
。Flatness (TTV)
。Bow
。Warp
。Film stress
Wafer Diameter | 300mm |
Thickness Accuracy | ±0.5 µm |
Resolution | 50nm |
Thickness range | 500 - 1000 µm |
Automatic wafer geometry gauge | yes |
Software | MXNT |