冲成股份有限公司 JC's Chunson Limited
MX 2012

MX 2012

E+H

The MX2012 works as manually loaded stand-alone station with a throughput of at least 50 wafers per hour. With its 69 measuring points it controls thickness, bow and warp in high resolution. Wafer stress evaluation is optionally available. Upright position measuring avoids gravity-induced sag. System can be converted for 200mm wafer measuring. Comes with our powerful MX-NT operating software.

High precision chip production geometry gauge for 300mm silicon wafers.

Measurement type
。Thickness

。Flatness (TTV)

。Bow

。Warp

。Film stress

Wafer Diameter 300mm
Thickness Accuracy ±0.5 µm
Resolution 50nm
Thickness range 500 - 1000 µm
Automatic wafer geometry gauge yes
Software MXNT