冲成股份有限公司 JC's Chunson Limited
MX 102-6

MX 102-6

E+H

Easy adaption to different thickness ranges within a few seconds. Integration into automatic robotic sorter systems possible. The MX102-6 is ideally suited for research & development, qualification of processes, and process control of thickness and flatness (TTV). A pair of capacitive sensors samples four radial profiles (45 degrees) on every wafer. One such profile consists of 200 local thickness values and is offset by 45 degrees relative to the neighbouring profile. Comes with our powerful MX-NT operating software.

High-resolution thickness and flatness (TTV) gauge for 100–150mm silicon wafers.

Measurement type
。Thickness

。TTV

Wafer Diameter 100mm, 125mm, 150mm
Accuracy ±0.1 µm
Resolution 10nm
Spartial resolution 1mm
Scans 4
Software MXNT