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- MX 604-ST
| Wafer Diameter | Square, Pseudo-Square up to 156 mm, 2" to 8" |
| Thickness Range | 60 - 300µm or 250 - 750µm |
| Thickness Accuracy | ± 1µm |
| Sensor Diameter | 20 mm |
| Active Area | 8 mm Ø |
| Distance from Edge | 10 mm |
| Measuring time | 0.3 s |
| Software | EHMaster |