E+H
Combined thickness and resistivity gauge for up to 156mm solar wafers
Measurement type
。Thickness
。Resistivity
Wafer Diameter | Square, Pseudo-Square up to 156 mm, 2" to 8" |
Thickness Range | 60 - 300µm or 250 - 750µm |
Thickness Accuracy | ± 1µm |
Sensor Diameter | 20 mm |
Active Area | 8 mm Ø |
Distance from Edge | 10 mm |
Measuring time | 0.3 s |
Software | EHMaster |