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- MX 3012-AC
MX 3012-AC
| Wafer Diameter | 75mm, 100mm, 150mm, 156mm, 200mm, 300mm |
| Accuracy | ±0.5 µm+0.05% |
| Resolution | 0.1µm |
| Thickness range | 50 - 1600 µm |
| Automatic wafer | geometry gauge no |
| Measuring time | 0.3 s |
| Wafer Diameter | 75mm, 100mm, 150mm, 156mm, 200mm, 300mm |
| Accuracy | ±0.5 µm+0.05% |
| Resolution | 0.1µm |
| Thickness range | 50 - 1600 µm |
| Automatic wafer | geometry gauge no |
| Measuring time | 0.3 s |