E+H
Easy one-point thickness gauge for 75–300mm semiconducting and metallic materials.
Measurement type
。Thickness
。Flatness (TTV)
Wafer Diameter | 75mm, 100mm, 150mm, 156mm, 200mm, 300mm |
Accuracy | ±0.5 µm+0.05% |
Resolution | 0.1µm |
Thickness range | 50 - 1600 µm |
Automatic wafer geometry gauge | No |
Measuring time | 0.3 s |