E+H
Easy one-point thickness gauge for 30–200mm semiconducting and metallic materials.
Measurement type
。Thickness
。Flatness (TTV)
Wafer Diameter | 30mm, 50mm, 75mm, 100mm, 156mm |
Accuracy | ± 0.5 µm +0.05 % |
Thickness range | 50 - 1600 µm |
Automatic wafer geometry gauge | No |
Software | MXNT |