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- MX 301-AC
MX 301-AC
| Wafer Diameter | 30mm, 50mm, 75mm, 100mm, 156mm |
| Accuracy | ± 0.5 µm +0.05 % |
| Thickness range | 50 - 1600 µm |
| Automatic wafer | geometry gauge no |
| Software | MXNT |
| Wafer Diameter | 30mm, 50mm, 75mm, 100mm, 156mm |
| Accuracy | ± 0.5 µm +0.05 % |
| Thickness range | 50 - 1600 µm |
| Automatic wafer | geometry gauge no |
| Software | MXNT |