E+H
Automatable geometry gauge for 125–156mm solar wafers.
Measurement type
。Thickness
。Flatness (TTV)
。Bow
。Warp
。Sori
Wafer Diameter | 125mm, 156mm |
Thickness Accuracy | ±1 µm |
Resolution | 0.1µm |
Thickness range | 200 - 600 µm |
Automatic wafer geometry gauge | Yes |
Software | MXNT |