冲成股份有限公司 JC's Chunson Limited
MX 204-8-49-q

MX 204-8-49-q

E+H

The MX204-8-49-q works as manually loaded stand-alone tool as well as fully integrated in automated robot systems. With its 49 measuring points it controls thickness, bow and warp in high resolution. Different wafer sizes can be used without changeover thanks to the upstream centering station. Comes with our powerful MX-NT operating software.

Automatable geometry gauge for 125–156mm solar wafers.

Measurement type

。Thickness
。Flatness (TTV)
。Bow
。Warp
。Sori

Wafer Diameter 125mm, 156mm
Thickness Accuracy ±1 µm
Resolution 0.1µm
Thickness range 200 - 600 µm
Automatic wafer geometry gauge  Yes
Software MXNT