冲成股份有限公司 JC's Chunson Limited
MX 608

MX 608

E+H

The MX608 is designed to characterize silicon wafers. It combines contactless thickness, resistivity and P/N dotation sensors. Automatic move-in and turn of the wafer allows up to 18 scans of each wafer. To be connected to a PC via serial interface. Comes with our powerful MX-NT operating software. Integration into automatic robotic sorter systems possible.

Combined thickness and resistivity gauge for 150mm and 200mm silicon wafers.

Measurement type

。Thickness

。Resistivity

。Sheet resistance

。P/N Dotation

Wafer Diameter 150mm, 200mm
Thickness 500 – 800 μm
Max. Warp 100 μm
Resistivity 0.001 – 200 Ohm·cm
Type check 0.020 – 200 Ohm·cm
Software MXNT