冲成股份有限公司 JC's Chunson Limited
MX 203-6-41-q

MX 203-6-41-q

E+H

High throughput: the MX203-6-41-q gauges with its 41 measuring points every wafer within max. 8 seconds. It controls thickness, bow and warp. Flexible wafer size adjustment by various centering-frames. Comes with our powerful MX-NT operating Software.

Fast contactless geometry gauge for 100–156mm solar wafers.

Measurement type
。Thickness
。Flatness (TTV)
。Bow
。Warp
。Sori

Wafer Diameter 100mm, 125mm, 156mm
Thickness Accuracy ±0.5 µm
Resolution 50nm
Thickness range 160 - 700 µm
Automatic wafer no
Software MXNT