E+H
Fast contactless geometry gauge for 100–156mm solar wafers.
Measurement type
。Thickness
。Flatness (TTV)
。Bow
。Warp
。Sori
Wafer Diameter | 100mm, 125mm, 156mm |
Thickness Accuracy | ±0.5 µm |
Resolution | 50nm |
Thickness range | 160 - 700 µm |
Automatic wafer | no |
Software | MXNT |